A COMPACT MICROPOSITIONER FOR USE IN ULTRAHIGH-VACUUM

We have designed and built a low profile compact micropositioner for use in air or ultrahigh vacuum. The dimensions are 3.1 x 1.0 X 0.75 cm3 with a 1.4 cm range of motion. The device is actuated by two piezoelectric tubes, and utilizes both stick slip and sequential clamping to attain linear motion in one dimension. For motion in two dimensions the flat profile allows units to be stacked. The micropositioner is capable of climbing an incline of 30-degrees while carrying a 17 g load. It is driven forward by staggered 0-250 V signals with a fast rise time and slow decay time. We obtained step sizes from 30 to 400 nm with standard deviation less than 15 nm, and have demonstrated a maximum average velocity of 0.14 mm/s.