GROWTH OF SOLID-SOLUTIONS OF ALUMINUM NITRIDE AND SILICON-CARBIDE BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引：25

作者：

JENKINS, I

IRVINE, KG

SPENCER, MG

DMITRIEV, V

CHEN, N

机构：

[1] HOWARD UNIV,SCH ENGN,DEPT ELECT ENGN,MAT SCI RES CTR EXCELLENCE,WASHINGTON,DC 20059

[2] I F IOFFE PHYS TECH INST,ST PETERSBURG 194021,RUSSIA

来源：

JOURNAL OF CRYSTAL GROWTH | 1993年 / 128卷 / 1-4期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0022-0248(93)90351-V

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We report the growth of solid solutions of (AlN)x(SiC)1-x over the entire composition range from x = 0.1 to x = 0.9. We believe this is the first report of solid solution of (AlN)x(SiC)1-x by metalorganic vapor deposition. Growth was performed in a low pressure vertical reactor using the silane-propane-ammonia-trimethylaluminium-hydrogen gas system on both silicon and silicon carbide substrates. Growth temperatures were between 1200 and 1250-degrees-C and groWth pressures varied between 10 and 76 Torr. The composition of the solid solutions were strongly dependent on system pressure.

引用

页码：375 / 378

页数：4

共 11 条

[1] NEW MATERIALS IN SI-C-AL-O-N AND RELATED SYSTEMS [J].

CUTLER, JB ;

MILLER, PD ;

RAFANIELLO, W ;

PARK, HK ;

THOMPSON, DP ;

JACK, KH .

NATURE, 1978, 275 (5679) :434-435

[2]

DMITRIEV V, 1992, 1ST WORKSH WID BANDG

[3]

Dmitriev V. A., 1991, Soviet Technical Physics Letters, V17, P214

[4] GROWTH OF SIC ON SILICON IN A LOW-PRESSURE VERTICAL REACTOR [J].

IRVINE, KG ;

JENKINS, I ;

GIVENS, W ;

SPENCER, MG ;

ALUKO, M .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 11 (1-4) :93-96

[5]

NURMAGOMEDOV SA, 1989, SOV PHYS SEMICOND+, V23, P100

[6]

Nurmagomedov Sh. A., 1986, Soviet Technical Physics Letters, V12

[7] INVESTIGATION OF PHASE-STABILITY IN THE SYSTEM SIC-AIN [J].

RAFANIELLO, W ;

PLICHTA, MR ;

VIRKAR, AV .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1983, 66 (04) :272-276

[8] FABRICATION AND CHARACTERIZATION OF SIC-AIN ALLOYS [J].

RAFANIELLO, W ;

CHO, K ;

VIRKAR, AV .

JOURNAL OF MATERIALS SCIENCE, 1981, 16 (12) :3479-3488

[9] COMPOSITION AND PROPERTIES OF HOT-PRESSED SIC-AIN SOLID-SOLUTIONS [J].

RUH, R ;

ZANGVIL, A .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1982, 65 (05) :260-265

[10]

RUTZ RF, 1969, Patent No. 3482837

← 1 2 →