HEATED LANGMUIR PROBE MEASUREMENTS OF REACTIVE DIRECT-CURRENT MAGNETRON PLASMAS

被引：13
作者：
BELL, BC
GLOCKER, DA
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词：
D O I：
10.1116/1.575598
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2047 / 2050
页数：4
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