DEFECT GENERATION DUE TO SURFACE CORRUGATION IN INGAASP/INP DFB LASER STRUCTURES GROWN BY MOVPE ON GRATING-FORMED INP SUBSTRATES

被引:15
作者
SATO, K
OISHI, M
ITAYA, Y
NAKAO, M
IMAMURA, Y
机构
[1] NTT Opto-electronics Lab, Japan
关键词
Corrugated Hetero-Interface - Distributed Feedback Laser - Indium Phosphide - Metalorganic Vapor Phase Epitaxy;
D O I
10.1016/0022-0248(88)90626-4
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:825 / 831
页数:7
相关论文
共 14 条
[1]  
CHU SNG, 1986, J APPL PHYS, V59, P344
[2]  
HOCKLY M, 1984, J CRYST GROWTH, V68, P344
[3]   LOW-THRESHOLD OPERATION OF 1.5 MU-M BURIED-HETEROSTRUCTURE DFB LASERS GROWN ENTIRELY BY LOW-PRESSURE MOVPE [J].
ITAYA, Y ;
OISHI, M ;
NAKAO, M ;
SATO, K ;
KONDO, Y ;
IMAMURA, Y .
ELECTRONICS LETTERS, 1987, 23 (05) :193-194
[4]  
Matsuoka T., 1986, Journal of the Electrochemical Society, V133, P2485, DOI 10.1149/1.2108455
[5]   CW OPERATION OF DFB-BH GAINASP INP LASERS IN 1,5-MU-M WAVELENGTH REGION [J].
MATSUOKA, T ;
NAGAI, H ;
ITAYA, Y ;
NOGUCHI, Y ;
SUZUKI, Y ;
IKEGAMI, T .
ELECTRONICS LETTERS, 1982, 18 (01) :27-28
[6]   THERMAL DEFORMATION OF SURFACE CORRUGATIONS ON INGAASP CRYSTALS [J].
NAGAI, H ;
NOGUCHI, Y ;
MATSUOKA, T .
JOURNAL OF CRYSTAL GROWTH, 1985, 71 (01) :225-231
[7]   INGAASP/INP DISTRIBUTED FEEDBACK BURIED HETEROSTRUCTURE LASERS WITH BOTH FACETS CLEAVED STRUCTURE [J].
NAGAI, H ;
MATSUOKA, T ;
NOGUCHI, Y ;
SUZUKI, Y ;
YOSHIKUNI, Y .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1986, 22 (03) :450-457
[8]   CHARACTERIZATION OF INGAASP INP DOUBLE-HETEROSTRUCTURE WAFERS GROWN BY METALORGANIC VAPOR-PHASE EPITAXY FOR SEMICONDUCTOR-LASERS BY PHOTOLUMINESCENCE INVESTIGATION WITH HIGH-POWER YAG-LASER EXCITATION [J].
NAKAO, M ;
SATO, K ;
OISHI, M ;
ITAYA, Y ;
IMAMURA, Y .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (05) :1722-1728
[9]   LOW-PRESSURE METALORGANIC VAPOR-PHASE EPITAXY OF INP IN A VERTICAL REACTOR [J].
OISHI, M ;
KUROIWA, K .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (05) :1209-1214
[10]   MOVPE-GROWN 1.5 MU-M DISTRIBUTED FEEDBACK LASERS ON CORRUGATED INP SUBSTRATES [J].
OISHI, M ;
NAKAO, M ;
ITAYA, Y ;
SATO, K ;
IMAMURA, Y .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1987, 23 (06) :822-827