共 50 条
- [1] HIGH-DENSITY PLASMA MODE OF AN INDUCTIVELY COUPLED RADIO-FREQUENCY DISCHARGE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 362 - 365
- [6] Dynamic model of the plasma sheath in high-plasma-density, radio-frequency discharges INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS, 1999, : 141 - 142
- [9] Experimental test of models of high-plasma-density, radio-frequency sheaths PHYSICAL REVIEW E, 1999, 59 (01): : 1059 - 1072