RAMAN-SCATTERING STUDIES OF CHEMICAL-VAPOR-DEPOSITED CUBIC SIC FILMS OF (100) SI

被引：173

作者：

FENG, ZC

MASCARENHAS, AJ

CHOYKE, WJ

POWELL, JA

机构：

[1] UNIV PITTSBURGH,DEPT PHYS & ASTRON,PITTSBURGH,PA 15260

[2] WESTINGHOUSE ELECT CORP,CTR RES & DEV,PITTSBURGH,PA 15235

[3] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 06期

关键词：

D O I：

10.1063/1.341533

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3176 / 3186

页数：11

共 48 条

[1]

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LO, YC .

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[6]

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[7]

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[8]

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[9]

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