THE INFLUENCE OF TARGET OXIDATION AND GROWTH-RELATED EFFECTS ON THE ELECTRICAL-PROPERTIES OF REACTIVELY SPUTTERED FILMS OF TIN-DOPED INDIUM OXIDE

被引：54
作者：
BUCHANAN, M
WEBB, JB
WILLIAMS, DF
机构：
来源：
THIN SOLID FILMS | 1981年 / 80卷 / 04期
关键词：
D O I：
10.1016/0040-6090(81)90604-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：373 / 382
页数：10
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