ELLIPSOMETRIC STUDY OF THIN-FILMS FORMED ON COPPER BY AQUEOUS BENZOTRIAZOLE AND BENZIMIDAZOLE

被引：38
作者：
HOBBINS, ND
ROBERTS, RF
机构：
[1] Bell Laboratories, Murray Hill
来源：
SURFACE TECHNOLOGY | 1979年 / 9卷 / 04期
关键词：
D O I：
10.1016/0376-4583(79)90098-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Ellipsometry has been used to determine the thickness and growth rate of protective copper-benzotriazole (CuBTA) and copper-benzimidazole (CuBIMDA) surface films formed on Cu2O/Cu substrates by immersion in warm (60 °C) aqueous (0.017 M) solutions of BTA and BIMDA. The growth rate of CuBTA films is found to be significantly less than that of CuBIMDA films. For 3 min immersions the CuBTA and CuBIMDA films grow to thicknesses of about 100 Å and about 475 Å respectively. A possible explanation of the generally greater protective properties of CuBTA compared with CuBIMDA is discussed. © 1979.
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页码：235 / 239
页数：5
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