EVALUATION OF ADJUSTMENT DATA FOR SIMPLE ELLIPSOMETERS

被引：5
作者：
RIEDLING, K
机构：
[1] Institut fuer Allgemeine Elektrotechnik, Technische Universitaet Wien
来源：
THIN SOLID FILMS | 1979年 / 61卷 / 03期
关键词：
D O I：
10.1016/0040-6090(79)90478-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A method for improving the accuracy of simple ellipsometers of the fixed retarder and fixed angle of incidence type is presented. All the appratus parameters affecting measurement accuracy-the retarder characteristics, the azimuthal alignment of the polarizer, analyser and retarder and the angle of incidence-can be checked and numerically aligned using only a number of measurement results. The method can be performed with a desk computer does not require alignment tools or standards. © 1979.
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页码：335 / 340
页数：6
相关论文
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McCrackin, Natl. Bur. Stand. (U.S.) Tech. Note, 479, (1969)
[2]  
Azzam, Bashara, Ellipsometry and Polarized Light, (1977)
[3]  
Instruction Manual on Applied Materials Ellipsometer II, Applied Materials, (1976)
[4]  
McCrackin, Passaglia, Stromberg, Steinberg, Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry, Journal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 67, (1963)
[5]  
Przyborski, Roed, Lippert, A refined oxidation-stripping technique of thin n-type Si films, Radiation Effects, 1, (1969)
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