COMPARATIVE-STUDY OF HYDROGEN EVOLUTION FROM AMORPHOUS HYDROGENATED SILICON FILMS

被引：32
|
作者：
BEYER, W [1 ]
WAGNER, H [1 ]
CHEVALLIER, J [1 ]
REICHELT, K [1 ]
机构：
[1] FORSCHUNGSZENTRUM JULICH, INST FESTKORPERFORSCH, D-5170 JULICH 1, FED REP GER
来源：
THIN SOLID FILMS | 1982年 / 90卷 / 02期
关键词：
D O I：
10.1016/0040-6090(82)90634-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：145 / 152
页数：8
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