VAPOR TRANSPORT THERMODYNAMICS OF GAP-CL2-H2 SYSTEM IN AN OPEN TUBE

被引：16

作者：

SEKI, H

ARAKI, H

机构：

来源：

关键词：

D O I：

10.1143/JJAP.6.1414

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1414 / &

共 17 条

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[6]

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[7]

ING SW, 1962, J ELECTROCHEM SOC, V109, P995

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SHUPP, BR .

[9] VAPOR GROWTH OF GAP ON GAAS SUBSTRATES [J].

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[10]

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