HYDRATION OF SPUTTER-DEPOSITED ALUMINA FILM

被引：0
作者：
KAWABE, T [1 ]
HANAZONO, M [1 ]
SONO, Y [1 ]
WAKI, M [1 ]
HARA, S [1 ]
机构：
[1] HITACHI LTD,HITACHI RES LAB,HITACHI,IBARAKI 31912,JAPAN
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 8B期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C431 / C431
页数：1
相关论文
共 50 条
[31]   CHARACTERIZATION OF SPUTTER-DEPOSITED ZRBXOY FILMS [J].
EBISAWA, J ;
HAYASHI, Y ;
ANDO, E ;
SUZUKI, K ;
MATSUMOTO, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1990, 8 (03) :1335-1339
[32]   CHARACTERISTICS OF SPUTTER-DEPOSITED MO FILMS [J].
SUZUKI, M ;
ASAI, K .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (01) :185-189
[33]   SPUTTER-DEPOSITED FILMS FOR DISPLAY DEVICES [J].
FRASER, DB .
THIN SOLID FILMS, 1972, 13 (02) :407-412
[34]   Sputter-deposited FeCoBC/AlNx multilayered film for wet-etching process [J].
Tomita, H. ;
Inoue, T. ;
Mizoguchi, T. ;
Sato, T. .
IEEE Transactions on Magnetics, 1999, 35 (5 pt 2) :3571-3573
[35]   SHAPE-MEMORY PROPERTIES IN NI-TI SPUTTER-DEPOSITED FILM [J].
BUSCH, JD ;
JOHNSON, AD ;
LEE, CH ;
STEVENSON, DA .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (12) :6224-6228
[36]   Analysis of Sputter-Deposited SnO thin Film with SnO/Sn Composite Target [J].
Kim, Cheol ;
Kim, Sungdong ;
Kim, Sarah Eunkyung .
KOREAN JOURNAL OF MATERIALS RESEARCH, 2016, 26 (04) :222-227
[37]   Sputter-deposited TiVCrZrW high entropy alloy film: Structure and tribological properties [J].
Ren, Ping ;
Si, Yanxin ;
Wang, Ganggang ;
Wen, Mao ;
Wang, Weiwei ;
Yan, Linhui ;
Yang, Xiaoyang ;
Song, Qiyao ;
Li, Zhaohai ;
Zhang, Shangzhou .
CERAMICS INTERNATIONAL, 2022, 48 (24) :37383-37393
[38]   Characterization of the interfacial reaction between sputter-deposited Ni film and Si substrate [J].
Zhou, R ;
Chen, CC ;
Hashimoto, M ;
Shi, J ;
Nakamura, Y .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (01) :179-182
[39]   EFFECT OF ADDITION OF CARBON ON MAGNETIC-PROPERTIES OF SPUTTER-DEPOSITED COCR FILM [J].
AWANO, H ;
MASUYA, H .
IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :2067-2069
[40]   Studies on the properties of sputter-deposited Sc-doped ZnO thin film [J].
Miao, Cunxing ;
Zhao, Zhanxia ;
Ma, Xiaomin ;
Ma, Zhongquan .
PHYSICA B-CONDENSED MATTER, 2010, 405 (17) :3787-3790
12345