A HIGH-CURRENT, HIGH-SPEED ELECTRON-BEAM LITHOGRAPHY COLUMN

被引：36
作者：
KELLY, J
GROVES, T
KUO, HP
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期
关键词：
D O I：
10.1116/1.571194
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：936 / 940
页数：5
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