IMPROVED METHOD OF ETCHING BY ION BOMBARDMENT

被引：1
|
作者：
BIERLEIN, TK
MASTEL, B
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1959年 / 30卷 / 09期
关键词：
D O I：
10.1063/1.1716768
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：832 / 833
页数：2
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