IMPROVED METHOD OF ETCHING BY ION BOMBARDMENT

被引：1

|

作者：

BIERLEIN, TK

MASTEL, B

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1959年 / 30卷 / 09期

关键词：

D O I：

10.1063/1.1716768

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：832 / 833

页数：2

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