CHARGING EFFECTS IN THE SECONDARY ION MASS-SPECTROMETRIC ANALYSIS OF TARGETS CONTAINING LOW-CONDUCTIVITY REGIONS

被引：38
作者：
REUTER, W
YU, ML
FRISCH, MA
SMALL, MB
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 02期
关键词：
D O I：
10.1063/1.327657
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：850 / 855
页数：6
相关论文
共 16 条
[1]  
ABROYAN IA, 1966, SOV PHYS-SOLID STATE, V7, P2954
[2]  
Afonina L. F., 1974, Soviet Physics - Solid State, V15, P1448
[3]   NEGATIVE ION BOMBARDMENT OF INSULATORS TO ALLEVIATE SURFACE CHARGE-UP [J].
ANDERSEN, CA ;
RODEN, HJ ;
ROBINSON, CF .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (08) :3419-+
[4]   SECONDARY ELECTRON EMISSION YIELDS OF SOME CERAMICS [J].
DAWSON, PH .
JOURNAL OF APPLIED PHYSICS, 1966, 37 (09) :3644-&
[5]   DEPENDENCE OF SECONDARY ELECTRON EMISSION ON CRYSTAL ORIENTATION [J].
LAPONSKY, AB ;
WHETTEN, NR .
PHYSICAL REVIEW LETTERS, 1959, 3 (11) :510-512
[6]   DEPTH PROFILING OF SODIUM IN SIO2-FILMS BY SECONDARY ION MASS-SPECTROMETRY [J].
MAGEE, CW ;
HARRINGTON, WL .
APPLIED PHYSICS LETTERS, 1978, 33 (02) :193-196
[7]  
MCCAUGHAN DV, 1974, CHARACTERIZATION SOL, P677
[8]  
MUELLER G, 1976, APPL PHYS, V10, P317
[9]  
MUELLER HO, 1937, Z PHYS, V104, P475
[10]  
NAKAMURA K, 1972, MASS SPECTROSC, V20, P1
12