ABSOLUTE CONCENTRATION MEASUREMENTS OF C-2 IN A DIAMOND CVD REACTOR BY LASER-INDUCED FLUORESCENCE

被引：26
作者：
KAMINSKI, C
EWART, P
机构：
[1] Clarendon Laboratory, Oxford University, Oxford, OX1 3PU, Parks Road
来源：
APPLIED PHYSICS B-LASERS AND OPTICS | 1995年 / 61卷 / 06期
关键词：
D O I：
10.1007/BF01091217
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
By use of Laser-Induced Fluorescence (LIF) the absolute concentration of the C-2 radical in a microwave excited diamond chemical vapour deposition plasma has been measured for the first time. LIF spectra of the d(3) Pi(g)-a(3) Pi(u) (1, 0) Swan band near 473 nm were recorded and synthesized theoretically allowing the plasma temperature of 2100 +/- 200 K to be inferred. Quenching rates were determined from time-resolved measurements of the fluorescence decay. By calibrating the LIF detection system, using spontaneous Raman scattering in H-2 in the reactor vessel, the absolute concentration of C-2 was determined to be (7.5 +/- 1.7) x 10(10) cm(-3). Observations of the C-2 density under varying plasma conditions are reported.
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页码：585 / 592
页数：8
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