THE IMPACT OF CLUSTERED DEFECT DISTRIBUTIONS IN IC FABRICATION

被引:30
作者
ALBIN, SL [1 ]
FRIEDMAN, DJ [1 ]
机构
[1] AT&T BELL LABS,TECH STAFF,MURRAY HILL,NJ 07974
关键词
D O I
10.1287/mnsc.35.9.1066
中图分类号
C93 [管理学];
学科分类号
12 ; 1201 ; 1202 ; 120202 ;
摘要
引用
收藏
页码:1066 / 1078
页数:13
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