ULTRA-PURE PROCESSING - AN ENABLING TECHNOLOGY FOR ULSI

被引:0
作者
BAKER, E [1 ]
CURRENT, M [1 ]
机构
[1] APPL MAT INC,DIV IMPLANT,SANTA CLARA,CA 95054
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:91 / 94
页数:4
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