HOLLOW-CATHODE MAGNETRON ION-SOURCE

被引:8
作者
MILJEVIC, V
机构
关键词
D O I
10.1063/1.1137585
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:121 / 123
页数:3
相关论文
共 14 条
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