Sensing applications of micro- and nanoelectromechanical resonators

被引：1

作者：

Niebelschuetz, F. ^{[1
]}

Cimalla, V. ^{[1
]}

Brueckner, K. ^{[1
]}

Stephan, R. ^{[1
]}

Tonisch, K. ^{[1
]}

Hein, M. A. ^{[1
]}

Ambacher, O. ^{[1
]}

机构：

[1] Tech Univ Ilmenau, Ctr Micro & Nanotechnol ZMN, Ilmenau, Germany

来源：

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART N-JOURNAL OF NANOMATERIALS NANOENGINEERING AND NANOSYSTEMS | 2007年 / 221卷 / 02期

关键词：

micro-electromechanical systems (MEMS); nanoelectromechanical systems (NEMS); biological sensing; resonator;

D O I：

10.1243/17403499JNN100

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The sensitivity of micro- and nanoscale resonator beams for sensing applications in ambient conditions was investigated. Micro-electromechanical (MEMS) and nanoelectromechanical systems (NEMS) were realized using silicon carbide (SiC) and polycrystalline aluminium nitride (AlN) as active layers on silicon substrates. Resonant frequencies and quality factors in vacuum as well as in air were measured. The sensitivity behaviour under ambient conditions with a mass loading in the range of picogram (pg) was verified and measurements with biological mass loading were performed. In addition, the sensitivity to pressure variations was analysed.

引用

页码：59 / 65

页数：7

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