共 13 条
[1]
PHOTODEGRADATION OF POLY (METHYL METHACRYLATE)
[J].
JOURNAL OF POLYMER SCIENCE PART A-1-POLYMER CHEMISTRY,
1966, 4 (5PA1)
:1209-&
[2]
CHANDROSS EA, 1981, SOLID STATE TECHNOL, V24, P81
[3]
GRUNEICH JS, 1980, ELECTRON BEAM TECHNO, P120
[4]
DEEP-UV PHOTORESISTS - POLY(METHYL METHACRYLATE-CO-INDENONE)
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 19 (04)
:1333-1337
[5]
HELLERT IN, 1975, J APPL POLYM SCI, V19, P1201
[8]
NAKANE J, 1979, SEMICONDUCTOR INT, V2, P45
[9]
POPRAVKO TS, 1977, DOKL AKAD NAUK SSSR+, V232, P856
[10]
SHUTZ AR, 1961, J PHYS CHEM, V65, P967