A NEW THIN-FILM HUMIDITY MICROSENSOR

被引：19
|
作者：
CHEN, SN
RAMAKRISHNAN, ES
HUANG, RS
GRANNEMANN, WW
机构：
来源：
IEEE ELECTRON DEVICE LETTERS | 1984年 / 5卷 / 11期
关键词：
D O I：
10.1109/EDL.1984.25984
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：452 / 453
页数：2
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