METAL DOPED POLYMER-FILMS PREPARED BY PLASMA POLYMERIZATION AND THEIR POTENTIAL APPLICATIONS

被引:29
作者
BIEDERMAN, H
机构
关键词
D O I
10.1016/0042-207X(84)90075-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:405 / 410
页数:6
相关论文
共 18 条
[1]  
BEALE HA, 1981, IND RES DEV JUL, P135
[2]   SPECTROSCOPIC MONITOR FOR SPUTTER-ETCHING PROCESSES [J].
BERNSTEIN, T ;
LABUDA, EF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01) :108-110
[3]  
BIEDERMAN H, UNPUB NUCL INSTRUM M
[4]  
BOOTHANOM N, 1974, THIN SOLID FILMS, V24, P395
[5]   METAL AND SALT CLUSTER FORMATION IN POLYMER-FILMS PRODUCED IN ARGON-C3F8 PLASMAS [J].
BUBECK, C ;
KAY, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :360-361
[6]   DEPENDENCE OF F-ATOM DENSITY ON PRESSURE AND FLOW-RATE IN CF4 GLOW-DISCHARGES AS DETERMINED BY EMISSION-SPECTROSCOPY [J].
COBURN, JW ;
CHEN, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :353-356
[7]  
DILKS A, 1979, ACS SYM SER, V108, P195
[8]   THE CONSTRUCTION OF SMALL PLANAR MAGNETRONS FOR SPUTTERING USE [J].
ELPHICK, C .
VACUUM, 1981, 31 (01) :5-7
[9]  
GADENNE P, 1980, 8TH P INT VAC C, V1, P363
[10]   INCORPORATION OF METALS INTO FLUOROPOLYMER FILMS SYNTHESIZED BY PLASMA TECHNIQUES [J].
KAY, E ;
DILKS, A ;
HETZLER, U .
JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1978, A12 (09) :1393-1398