LOW-NOISE GAAS METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTOR MADE BY ION-IMPLANTATION

被引:13
作者
FENG, M
EU, VK
KANBER, H
WATKINS, E
SCHELLENBERG, JM
YAMASAKI, H
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D O I
10.1063/1.93265
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O59 [应用物理学];
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页码:802 / 804
页数:3
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共 10 条
[1]   GAAS MESFET PREPARED BY MOLECULAR-BEAM EPITAXY (MBE) [J].
CHO, AY ;
CHEN, DR .
APPLIED PHYSICS LETTERS, 1976, 28 (01) :30-31
[2]   CR PROFILES IN SEMI-INSULATING GAAS AFTER ANNEALING WITH AND WITHOUT SIO2 ENCAPSULANTS IN A H2-AS4 ATMOSPHERE [J].
EU, V ;
FENG, M ;
HENDERSON, WB ;
KIM, HB ;
WHELAN, JM .
APPLIED PHYSICS LETTERS, 1980, 37 (05) :473-475
[3]   STUDY OF ELECTRICAL AND CHEMICAL PROFILES OF SI IMPLANTED IN SEMI-INSULATING GAAS SUBSTRATE ANNEALED UNDER SIO2 AND CAPLESS [J].
FENG, M ;
KWOK, SP ;
EU, V ;
HENDERSON, BW .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (04) :2990-2993
[4]   OPTIMAL NOISE-FIGURE OF MICROWAVE GAAS-MESFETS [J].
FUKUI, H .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (07) :1032-1037
[5]  
HUANG C, 1981, IEEE MTFS INT MICROW, P25
[6]  
KAMEI K, 1980, IEDM102 DIG TECH PAP
[7]   SUPER LOW-NOISE GAAS-MESFETS WITH A DEEP-RECESS STRUCTURE [J].
OHATA, K ;
ITOH, H ;
HASEGAWA, F ;
FUJIKI, Y .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (06) :1029-1034
[8]   LOW-NOISE GAAS FIELD-EFFECT TRANSISTORS PREPARED BY MOLECULAR-BEAM EPITAXY [J].
OMORI, M ;
DRUMMOND, TJ ;
MORKOC, H .
APPLIED PHYSICS LETTERS, 1981, 39 (07) :566-569
[9]  
SUZUKI T, 1980, IEEE T MICROW THEORY, P367
[10]  
YAMASAKI H, 1980, IEDM106 DIG TECH PAP