SURFACE STATE GENERATION IN MOS STRUCTURE BY APPLYING HIGH-FIELD TO SIO2 FILM

被引:20
作者
NAKAGIRI, M [1 ]
机构
[1] NIPPON ELECT CO LTD,IC DIV,SHIMONUMABE,KAWASAKI,JAPAN
关键词
D O I
10.1143/JJAP.13.1610
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1610 / 1617
页数:8
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