HYDROGEN PROFILES IN WATER-OXIDIZED SILICON

被引:20
作者
BREED, DJ
DOREMUS, RH
机构
[1] PHILIPS RES LABS, EINDHOVEN, NETHERLANDS
[2] RENSSELAER POLYTECH INST, DEPT MAT ENGN, TROY, NY 12181 USA
关键词
D O I
10.1021/j100563a008
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:2471 / 2473
页数:3
相关论文
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