THE PROPERTIES OF TITANIUM-CONTAINING AMORPHOUS HYDROGENATED CARBON-FILMS

被引：12

作者：

WANG, M ^{[1
]}

SCHMIDT, K ^{[1
]}

REICHELT, K ^{[1
]}

DIMIGEN, H ^{[1
]}

HUBSCH, H ^{[1
]}

机构：

[1] PHILIPS GMBH, W-2000 HAMBURG, GERMANY

来源：

SURFACE & COATINGS TECHNOLOGY | 1991年 / 47卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(91)90342-T

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Metal-containing amorphous hydrogenated carbon (Ti-C:H) films were prepared on silicon substrates in a reactive r.f. sputtering process (13.56 MHz). Total hydrogen concentration, mass density, microhardness, Young's modulus and adhesion were determined by elastic recoil detection, Rutherford backscattering, nanoindenter and scratch tester, respectively. Results show that these properties depend strongly on titanium concentration. At a certain titanium concentration, quite high hardness, Young's modulus and adhesion are obtained compared with the corresponding values of a-C:H films.

引用

页码：691 / 695

页数：5

共 5 条

[1]

Dimigen H., 1983, Philips Technical Review, V41, P186

[2]

DIMIGEN H, 1985, Patent No. 4525417

[3] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA [J].