SINGLE CRYSTALLINE SI ISLANDS ON AN AMORPHOUS INSULATING LAYER RECRYSTALLIZED BY AN INDIRECT LASER-HEATING TECHNIQUE FOR 3-DIMENSIONAL INTEGRATED-CIRCUITS

被引：14
作者：
MUKAI, R
SASAKI, N
IWAI, T
KAWAMURA, S
NAKANO, M
机构：
来源：
APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 10期
关键词：
D O I：
10.1063/1.94624
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：994 / 996
页数：3
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