HIGH-EFFICIENCY CONTINUOUS SURFACE-RELIEF GRATINGS FOR 2-DIMENSIONAL ARRAY GENERATION

被引：31

作者：

EHBETS, P ^{[1
]}

HERZIG, HP ^{[1
]}

PRONGUE, D ^{[1
]}

GALE, MT ^{[1
]}

机构：

[1] PAUL SCHERRER INST,CH-8048 ZURICH,SWITZERLAND

来源：

OPTICS LETTERS | 1992年 / 17卷 / 13期

关键词：

D O I：

10.1364/OL.17.000908

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Continuous surface-relief phase gratings for two-dimensional (2-D) array generation have been realized by laser-beam writing lithography. For a 9 X 9 fan-out element, a diffraction efficiency of 94% and a uniformity of better than +/-8% have been achieved. These are, to our knowledge, the best published results for 2-D surface-relief fan-out elements. Separable and nonseparable solutions for the design of 2-D fan-out elements are discussed.

引用

页码：908 / 910

页数：3

共 6 条

[1] FAN-OUT GRATINGS WITH A CONTINUOUS PROFILE [J].

DALY, D ;

HODSON, SM ;

HUTLEY, MC .

OPTICS COMMUNICATIONS, 1991, 82 (3-4) :183-187

[2]

GALE MT, 1983, P SOC PHOTOOPT INSTR, V308, P347

[3]

GALE MT, IN PRESS APPL OPT

[4] DESIGN AND FABRICATION OF HIGHLY EFFICIENT FAN-OUT ELEMENTS [J].

HERZIG, HP ;

PRONGUE, D ;

DANDLIKER, R .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (07) :L1307-L1309

[5]

PRONGUE D, IN PRESS APPL OPT

[6] DETOUR-PHASE KINOFORM INTERCONNECTS - THE CONCEPT AND FABRICATION CONSIDERATIONS [J].

TURUNEN, J ;

FAGERHOLM, J ;

VASARA, A .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1990, 7 (07) :1202-1208

← 1 →