DEPTH PROFILING OF LOW-ENERGY IMPLANTED IONS USING FIELD-ION AND ELECTRON-MICROSCOPY TECHNIQUES

被引:0
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作者
WALCK, SD [1 ]
机构
[1] UNIV ALABAMA,DEPT MAT ENGN,UNIV STN,BIRMINGHAM,AL 35294
来源
JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE | 1987年 / 6卷 / 03期
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中图分类号
Q [生物科学];
学科分类号
07 ; 0710 ; 09 ;
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页码:313 / 313
页数:1
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