ON THE ORDER-DISORDER PHENOMENA IN COPT THIN-FILMS DEPOSITED BY RF SPUTTERING

被引:5
作者
TUTOVAN, V [1 ]
GEORGESCU, V [1 ]
CHIRIAC, H [1 ]
机构
[1] TECH PHYS CTR,IASSY,ROMANIA
关键词
D O I
10.1016/0040-6090(83)90441-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:253 / 256
页数:4
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