STUDIES OF TITANIUM-DIOXIDE FILM GROWTH FROM TITANIUM TETRAISOPROPOXIDE

被引：52
|
作者：
WU, YM [1 ]
BRADLEY, DC [1 ]
NIX, RM [1 ]
机构：
[1] UNIV LONDON,QUEEN MARY & WESTFIELD COLL,DEPT CHEM,MILE END RD,LONDON E1 4NS,ENGLAND
来源：
APPLIED SURFACE SCIENCE | 1993年 / 64卷 / 01期
关键词：
D O I：
10.1016/0169-4332(93)90018-7
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The surface-mediated decomposition of titanium isopropoxide at low pressures has been followed using temperature-programmed reaction spectroscopy and reactive scattering measurements. Film growth is initiated at approximately 450 K, with kinetics controlled by the decomposition of adsorbed intermediates, giving a mixture of acetone, isopropanol and propene as gas-phase by-products. At high temperatures (> 675 K) the principal by-product is propene and adsorption kinetics may become rate-limiting.
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页码：21 / 28
页数：8
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