LOW-TEMPERATURE SYNTHESIS OF SILICON-NITRIDE SOLID-SOLUTION

被引：5

作者：

MASAKI, H ^{[1
]}

OYAMA, Y ^{[1
]}

KAMIGAITO, O ^{[1
]}

机构：

[1] TOYOTA CENT RES & DEV LABS INC,2-12 HISAKATA,NAGOYA,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1975年 / 14卷 / 02期

关键词：

D O I：

10.1143/JJAP.14.301

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：301 / 302

页数：2

共 50 条

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