LOW-TEMPERATURE SYNTHESIS OF SILICON-NITRIDE SOLID-SOLUTION

被引：5
|
作者：
MASAKI, H [1 ]
OYAMA, Y [1 ]
KAMIGAITO, O [1 ]
机构：
[1] TOYOTA CENT RES & DEV LABS INC,2-12 HISAKATA,NAGOYA,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1975年 / 14卷 / 02期
关键词：
D O I：
10.1143/JJAP.14.301
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：301 / 302
页数：2
相关论文
共 50 条
  • [1] A low-temperature solution for silicon nitride deposition
    Laxman, RK
    Anderson, TD
    Mestemacher, JA
    SOLID STATE TECHNOLOGY, 2000, 43 (04) : 79 - +
  • [2] LOW-TEMPERATURE SILICON-NITRIDE - A PROMISING DIELECTRIC IN SEMICONDUCTOR TECHNOLOGY
    ZAKHARIN, VI
    RUBTSOV, NM
    RUBTSOV, VI
    SHULGA, YM
    THIN SOLID FILMS, 1992, 216 (02) : 268 - 273
  • [3] LOW-TEMPERATURE CHEMICAL-VAPOR-DEPOSITION OF SILICON-NITRIDE
    KANOH, H
    SUGIURA, O
    FUJIOKA, S
    ARAMAKI, Y
    HATTORI, T
    MATSUMURA, M
    JOURNAL DE PHYSIQUE IV, 1991, 1 (C2): : 831 - 837
  • [4] LOW-TEMPERATURE DEPOSITION OF AMORPHOUS-SILICON OXIDE AND SILICON-NITRIDE FILMS
    RICHARD, PD
    TSU, DV
    LUCOVSKY, G
    LIN, SY
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 925 - 928
  • [5] Low Temperature Plasma Synthesis of Photoluminescent Nanocrystalline Silicon-Nitride
    Sain, Basudeb
    Das, Debajyoti
    SOLID STATE PHYSICS, PTS 1 AND 2, 2012, 1447 : 313 - 314
  • [6] LOW-TEMPERATURE PHOTO-CVD SILICON-NITRIDE - PROPERTIES AND APPLICATIONS
    PETERS, JW
    GEBHART, FL
    HALL, TC
    SOLID STATE TECHNOLOGY, 1980, 23 (09) : 121 - 126
  • [7] LOW-TEMPERATURE GATE DIELECTRICS FORMED BY PLASMA ANODIZATION OF SILICON-NITRIDE
    GOSWAMI, R
    BUTCHER, JB
    GINIGE, R
    ZHANG, JF
    TAYLOR, S
    ECCLESTON, W
    ELECTRONICS LETTERS, 1988, 24 (20) : 1269 - 1270
  • [8] LOW-TEMPERATURE SILICON-NITRIDE DEPOSITION AT LOW-TEMPERATURE USING MICROWAVE-EXCITED ACTIVE NITROGEN
    SHIBAGAKI, M
    HORIIKE, Y
    YAMAZAKI, T
    KASHIWAGI, M
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C286 - C286
  • [9] Low-temperature PECVD silicon-nitride passivation for perovskite solar cell
    Lai, Tse-Lin
    Lee, Yun-Fong
    Hsu, Ya-Hui
    Tsai, Chieh-Pu
    Huang, Chun-Kai
    Liu, Cheng-Yi
    MATERIALS CHEMISTRY AND PHYSICS, 2023, 294
  • [10] LOW-TEMPERATURE PLASMA COATING OF ELECTROLUMINESCENCE PARTICLES WITH SILICON-NITRIDE FILM
    YAN, S
    MAEDA, H
    HAYASHI, JI
    KUSAKABE, K
    MOROOKA, S
    OKUBO, T
    JOURNAL OF MATERIALS SCIENCE, 1993, 28 (07) : 1829 - 1833
12345