RF-MAGNETRON SPUTTERING OF FERROELECTRIC PZT FILMS

被引：5
|
作者：
KRUPANIDHI, SB [1 ]
MAFFEI, N [1 ]
SAYER, M [1 ]
ELASSAL, K [1 ]
机构：
[1] ALMAX IND,LINDSAY,ONTARIO,CANADA
来源：
FERROELECTRICS | 1983年 / 51卷 / 1-2期
关键词：
D O I：
10.1080/00150198308009058
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：93 / 98
页数：6
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