CHARACTERISTICS AND 3-DIMENSIONAL INTEGRATION OF MOSFETS IN SMALL-GRAIN LPCVD POLYCRYSTALLINE SILICON

被引：160
作者：
MALHI, SDS
SHICHIJO, H
BANERJEE, SK
SUNDARESAN, R
ELAHY, M
POLLACK, GP
RICHARDSON, WF
SHAH, AH
HITE, LR
WOMACK, RH
CHATTERJEE, PK
LAM, HW
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1985年 / 32卷 / 02期
关键词：
D O I：
10.1109/T-ED.1985.21939
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：258 / 281
页数：24
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