PHOSPHORUS LIQUID-METAL ION-SOURCE USING A PT-P-SB ALLOY

被引：9
作者：
UMEMURA, K
MADOKORO, Y
SHUKURI, S
OHNISHI, T
ISHITANI, T
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 04期
关键词：
D O I：
10.1116/1.575572
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2457 / 2461
页数：5
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