ION-STIMULATED SORPTION - AN ION-ASSISTED TECHNOLOGY WITH NEW POSSIBILITIES

被引：16
作者：
GRIGOROV, GI
MARTEV, IN
机构：
来源：
THIN SOLID FILMS | 1986年 / 143卷 / 02期
关键词：
D O I：
10.1016/0040-6090(86)90385-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：177 / 185
页数：9
相关论文
共 23 条
[1]  
Auciello O., 1984, Ion Bombardment Modification of Surfaces: Fundamentals and Applications
[2]   THE ACTIVATED REACTIVE EVAPORATION PROCESS - DEVELOPMENTS AND APPLICATIONS [J].
BUNSHAH, RF .
THIN SOLID FILMS, 1981, 80 (1-3) :255-261
[3]   ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J].
BUNSHAH, RF ;
RAGHURAM, AC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06) :1385-&
[4]   METASTABLE PHASE FORMATION IN ION-IMPLANTED METALS [J].
FOLLSTAEDT, DM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :11-19
[5]   STIMULATION OF SORPTION ON METAL-FILMS BY MEANS OF RADIATION DEFECTS [J].
GRIGOROV, GI ;
MARTEV, IN ;
TZATZOV, KK .
THIN SOLID FILMS, 1981, 76 (03) :269-272
[6]   OPTICALLY SELECTIVE COATINGS OF TI-N COMPOUNDS OBTAINED BY ION-STIMULATED SORPTION [J].
GRIGOROV, GI ;
MARTEV, IN ;
BALABANOV, S .
THIN SOLID FILMS, 1986, 137 (01) :1-5
[7]   THEORY OF GETTER PUMP EVALUATION - STICKING COEFFICIENTS OF COMMON GASES ON CONTINUOUSLY DEPOSITED GETTER FILMS [J].
GRIGOROV, GI ;
TZATZOV, KK .
VACUUM, 1983, 33 (03) :139-148
[8]  
GRIGOROV GI, 1979, Patent No. 26460
[9]  
GRIGOROV GY, 1979, DOKL BOLG AKAD NAUK, V32, P1069
[10]   TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF TIC AND VC-TIC DEPOSITS PREPARED BY ACTIVATED REACTIVE EVAPORATION [J].
JACOBSON, BE ;
BUNSHAH, RF ;
NIMMAGADDA, R .
THIN SOLID FILMS, 1978, 54 (01) :107-118
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