The Innovated Flexible Surface Acoustic Wave Devices on Fully InkJet Printing Technology

被引：8

作者：

Chen, Cha'o-Kuang ^{[1
]}

Lin, David T. W. ^{[2
]}

Juang, Yung-Der ^{[3
]}

Hu, Yuh-Chung ^{[4
]}

Kuo, Yen-Ting ^{[2
]}

Chen, Chu-Yu ^{[5
]}

机构：

[1] Natl Cheng Kung Univ, Dept Mech Engn, Tainan, Taiwan

[2] Natl Univ Tainan, Inst Mech Syst Engn, Tainan, Taiwan

[3] Natl Univ Tainan, Dept Mat Sci, Tainan, Taiwan

[4] Natl Ilan Univ, Dept Mech & Elect Engn, Ilan, Taiwan

[5] Natl Univ Tainan, Dept Elect Engn, Tainan, Taiwan

来源：

SMART SCIENCE | 2013年 / 1卷 / 01期

关键词：

Surface Acoustic Wave Device; Fully Inkjet Printing; ZnO;

D O I：

10.1080/23080477.2013.11665581

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

An innovated fabricated process of the flexible surface acoustic wave (SAW) device is proposed in this study. Fully inkjet printing and sol-gel technology are used in this fabricated process. The flexible SAW device is composed of a ZnO layer sandwiched in between a flexible polyimide plastic sheet and two sets of interdigital transducers layer. The material of the top interdigital transducer layer is nano silver. The ZnO solution is prepared by sol-gel technology. Both the ZnO and top interdigital transducer layers are deposited by inkjet printing. The fully inkjet printing process possesses the advantages of direct patterning and low-cost. It does not require photolithography and etching processes since the pattern is directly printed on the flexible sheet. The center frequency of this prototype is matched with the design frequency. The prototype demonstrates that the presented flexible SAW device is available for the possible application in future. It may be applied to the sensing on curve surface.

引用

页码：13 / 17

页数：5

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