EXPERIMENTAL TESTS OF THE STEADY-STATE MODEL FOR OXYGEN REACTIVE ION ETCHING OF SILICON-CONTAINING POLYMERS

被引：25
作者：
JURGENSEN, CW
SHUGARD, A
DUDASH, N
REICHMANIS, E
VASILE, MJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期
关键词：
D O I：
10.1116/1.575455
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：2938 / 2944
页数：7
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