HYDROGEN SPUTTERING OF CARBON THIN-FILMS DEPOSITED ON PLATINUM

被引：17
|
作者：
SMITH, JN [1 ]
MEYER, CH [1 ]
LAYTON, JK [1 ]
机构：
[1] GEN ATOM CO,SAN DIEGO,CA 92138
来源：
JOURNAL OF NUCLEAR MATERIALS | 1977年 / 67卷 / 1-2期
关键词：
D O I：
10.1016/0022-3115(77)90178-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：234 / 235
页数：2
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