A SCANNED SOURCE-X-RAY MICROSCOPE

被引：5

作者：

MICHETTE, AG ^{[1
]}

FEDOSEJEVS, R ^{[1
]}

PFAUNTSCH, SJ ^{[1
]}

BOBKOWSKI, R ^{[1
]}

机构：

[1] UNIV ALBERTA, DEPT ELECT ENGN, EDMONTON T6G 2G7, ALBERTA, CANADA

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1994年 / 5卷 / 05期

关键词：

Edge resolution - Laser plasma X ray source - Scanned source X ray microscope - Zone plate optics;

D O I：

10.1088/0957-0233/5/5/014

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The first results using a scanning x-ray microscope, with zone plate optics, specifically designed for use with a laser-plasma x-ray source are reported. Unlike previous microscopes of this type, in which the specimens were mechanically scanned, in the present arrangement the specimen was kept stationary and the source was moved, the zone plate demagnifying this movement on the specimen. Images of test specimens show an edge resolution of 0.35 +/- 0.14 mum, apparently limited by noise.

引用

页码：555 / 559

页数：5

共 13 条

[1] ANDERSON EH, 1992, XRAY MICROSCOPY, V3, P75
[2] ARITOME H, 1993, P SOC PHOTO-OPT INS, V1741, P129, DOI 10.1117/12.138726
[3] BROWNE MT, 1992, XRAY MICROSCOPY 3, V67, P355
[4] CHARALAMBOUS PS, 1992, SPRINGER SERIES OPTI, V67, P79
[5] OPTICS OF THE FOCUSING X-RAY MICROSCOPE
DYSON, J
[J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1952, 65 (392): : 580 - 589
[6] FEDOSEJEVS R, 1992, P SOC PHOTO-OPT INS, V1671, P373, DOI 10.1117/12.136027
[7] KUHNE M, 1992, SPRINGER SERIES OPTI, V67, P39
[8] LEBERT R, 1992, SPRINGER SER OPT SCI, V67, P62
[9] SCANNING-X-RAY MICROSCOPY USING A LASER-PLASMA SOURCE
MICHETTE, AG
TURCU, ICE
SCHULZ, MS
BROWNE, MT
MORRISON, GR
FLUCK, P
BUCKLEY, CJ
FOSTER, GF
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (06) : 1478 - 1482
[10] MICHETTE QAG, 1992, SPRINGER SERIES OPTI, V67, P62

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