QUANTITATIVE SURFACE STRUCTURAL DETERMINATION USING IMPACT COLLISION ION-SCATTERING SPECTROSCOPY

被引:7
作者
YARMOFF, JA
WILLIAMS, RS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期
关键词
D O I
10.1116/1.573588
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
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页码:1274 / 1277
页数:4
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