SEMICONDUCTOR POLYIMIDE INTERFACE FORMATION - AN X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF GERMANIUM CHEMICAL BONDING

被引：19
作者：
ATANASOSKA, L
MEYER, HM
ANDERSON, SG
WEAVER, JH
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 04期
关键词：
D O I：
10.1116/1.575008
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：2175 / 2181
页数：7
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