SPATIAL DEPENDENCE OF PARTICLE LIGHT-SCATTERING IN AN RF SILANE DISCHARGE

被引：129

作者：

ROTH, RM

SPEARS, KG

STEIN, GD

WONG, G

机构：

[1] NORTHWESTERN UNIV, DEPT CHEM, EVANSTON, IL 60201 USA

[2] NORTHWESTERN UNIV, DEPT MECH ENGN, EVANSTON, IL 60201 USA

[3] NORTHWESTERN UNIV, DEPT MAT SCI, EVANSTON, IL 60201 USA

[4] NORTHWESTERN UNIV, DEPT PHYS & ASTRON, EVANSTON, IL 60201 USA

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 03期

关键词：

D O I：

10.1063/1.95648

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：253 / 255

页数：3

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