THE CRITERIA FOR SURFACE REPRODUCIBILITY DURING EROSION OR GROWTH

被引：7

作者：

CARTER, G ^{[1
]}

KATARDJIEV, IV ^{[1
]}

NOBES, MJ ^{[1
]}

SMITH, R ^{[1
]}

机构：

[1] LOUGHBOROUGH UNIV TECHNOL,DEPT MATH,LOUGHBOROUGH LE11 3TU,LEICS,ENGLAND

来源：

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 1987年 / 55卷 / 06期

关键词：

COATINGS - FILMS - Growing - SEMICONDUCTOR DEVICE MANUFACTURE;

D O I：

10.1080/01418618708214382

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The general theory of erosion and growth of a surface, treated as an advancing (or retreating) wavefront, is applied to evaluate the conditions necessary to ensure time-independent surface reproducibility. It is shown that homogeneous and heterogeneous systems must be analyzed separately and that, in the former case, surface reproducibility only occurs for well-defined variations in the surface normal velocity with surface orientations. In the latter case, spatial variations in the surface normal velocity can compensate for the orientational variations. These results are of technological interest in such fields as microlithographic patterning of semiconductor devices and surface coating.

引用

页码：779 / 789

页数：11

共 8 条

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[4]

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SMITH, R ;

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[6]

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[7]

SMITH R, 1981, PHIL MAG A, V44, P873

[8]

Whitham GB., 1974, PURE APPL MATH

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