A FIBEROPTIC REFLECTIVE DISPLACEMENT MICROMETER

被引:31
作者
KO, WH
CHANG, KM
HWANG, GJ
机构
[1] National Chiao Tung University, Hsinchu
关键词
DISPLACEMENT MICROMETERS; FIBER OPTICS;
D O I
10.1016/0924-4247(95)01018-V
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A simple fiber-optic reflection displacement micrometer with a sensitivity of 200 mV mu m(-1) and a resolution as low as 0.01 mu m is reported with a theoretical explanation of the experimental results. The sensor consists of a pulsed LED light source and a pair (A and B) of identical receiving fibers and photodetectors that detects the light reflected from the surface being measured. The differential signal (A-B) of the detectors is proportional to the displacement of the surface relative to a null position. The light intensity variation of the source and the reflectance change of the surface are compensated when the (A-B) signal is divided by the sum (A+B). The resolution is limited by noise and interference (vibration of the base). A resolution of 0.01 mu m can be achieved at narrow signal bands (d.c, to 3 Hz) excluding the low-frequency noise and vibration. The range, sensitivity and non-linearity can be adjusted according to the theory. The micrometer offers the advantages of non-contact, no electrical interference, simplicity, low cost and portability. It can be used in medical experiments and laboratory instruments.
引用
收藏
页码:51 / 55
页数:5
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