AUGER-ELECTRON SPECTROSCOPY AND ION SPUTTER PROFILES OF OXIDES ON ALUMINUM

被引：46
作者：
SMITH, T [1 ]
机构：
[1] ROCKWELL INT,CTR SCI,THOUSAND OAKS,CA 91360
来源：
SURFACE SCIENCE | 1976年 / 55卷 / 02期
关键词：
D O I：
10.1016/0039-6028(76)90260-0
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：601 / 624
页数：24
相关论文
共 11 条
[1]   ELLIPSOMETRIC ANALYSIS OF AMORPHOUS OXIDE FILM GROWTH AND CRYSTALLINE OXIDE ISLAND DEVELOPMENT DURING THERMAL OXIDATION OF ALUMINUM [J].
BADIA, M .
THIN SOLID FILMS, 1972, 13 (02) :329-333
[2]   ERRORS ARISING FROM SURFACE ROUGHNESS IN ELLIPSOMETRIC MEASUREMENT OF REFRACTIVE INDEX OF A SURFACE [J].
FENSTERMAKER, CA ;
MCCRACKIN, FL .
SURFACE SCIENCE, 1969, 16 :85-+
[3]   QUANTITATIVE COMPARISON OF TI AND TIO SURFACES USING AUGER-ELECTRON AND SOFT-X-RAY APPEARANCE POTENTIAL SPECTROSCOPIES [J].
GRANT, JT ;
HAAS, TW ;
HOUSTON, JE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :227-230
[4]   MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].
MCCRACKIN, FL ;
PASSAGLIA, E ;
STROMBERG, RR ;
STEINBERG, HL .
JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+
[5]  
MCCRACKIN FL, 1969, NBS479
[6]   ELLIPSOMETRIC PARAMETERS OF ROUGH SURFACES AND OF A SYSTEM SUBSTRATE THIN FILM WITH ROUGH BOUNDARIES [J].
OHLIDAL, I ;
LUKES, F .
OPTICA ACTA, 1972, 19 (10) :817-&
[7]   IDENTIFICATION OF AUGER SPECTRA FROM ALUMINUM [J].
QUINTO, DT ;
ROBERTSON, WD .
SURFACE SCIENCE, 1971, 27 (03) :645-+
[8]   QUANTITATIVE AUGER ANALYSIS OF COPPER-NICKEL ALLOY SURFACES AFTER ARGON ION-BOMBARDMENT [J].
SHIMIZU, H ;
ONO, M ;
NAKAYAMA, K .
SURFACE SCIENCE, 1973, 36 (02) :817-821
[9]   OXIDATION OF TITANIUM BETWEEN 25 DEGREES C AND 400 DEGREES C [J].
SMITH, T .
SURFACE SCIENCE, 1973, 38 (02) :292-312
[10]  
TAJIMA S, 1970, ADV CORROSION SCI TE, V1
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