EFFECTS OF SURFACE MICRO-ROUGHNESS IN ELLIPSOMETRY

被引：0
|
作者：
CHURCH, EL [1 ]
ZAVADA, JM [1 ]
机构：
[1] FRANKFORD ARSENAL,PITMAN DUNN LAB,PHILADELPHIA,PA 19137
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1976年 / 66卷 / 10期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：1136 / 1136
页数：1
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